Study of copper thick film metallization on aluminum nitride

dc.contributor.authorHlína, Jiří
dc.contributor.authorŘeboun, Jan
dc.contributor.authorHamáček, Aleš
dc.date.accessioned2020-01-13T11:00:19Z
dc.date.available2020-01-13T11:00:19Z
dc.date.issued2020
dc.description.abstract-translatedThis paper is focused on the study of copper thick film metallization on AlN. The copper metallization was realized by Thick Printed Copper (TPC) technology. The copper films were printed with a new adhesion copper paste designed for both AlN and Al2O3 substrates. Scanning electron microscopy (SEM) and energy-dispersive X-ray spectroscopy (EDS) analyses on cross-sections have shown that the paste adhe- sion to AlN and Al2O3 is provided by different bonding mechanisms. The influence of different adhesion mechanisms on electrical and mechanical properties as well as the morphology of copper films on AlN and Al2O3 substrates are described in this paper.en
dc.format5 s.cs
dc.format.mimetypeapplication/pdf
dc.identifier.citationHLÍNA, J., ŘEBOUN, J., HAMÁČEK, A. Study of copper thick film metallization on aluminum nitride. Scripta materialia, 2020, roč. 176, č. February 2020, s. 23-27. ISSN 1359-6462.en
dc.identifier.document-number496838000005
dc.identifier.doi10.1016/j.scriptamat.2019.09.029
dc.identifier.issn1359-6462
dc.identifier.obd43926973
dc.identifier.uri2-s2.0-85072874291
dc.identifier.urihttp://hdl.handle.net/11025/36199
dc.language.isoenen
dc.project.IDEF18_069/0009855/Elektrotechnické technologie s vysokým podílem vestavěné inteligencecs
dc.project.IDSGS-2018-016/Diagnostika a materiály v elektrotechnicecs
dc.publisherElsevieren
dc.relation.ispartofseriesScripta Materialiaen
dc.rightsPlný text je přístupný v rámci univerzity přihlášeným uživatelům.cs
dc.rights© Elsevieren
dc.rights.accessrestrictedAccessen
dc.subject.translatedceramicsen
dc.subject.translatedmetallizationsen
dc.subject.translatednitridesen
dc.subject.translatedcopperen
dc.subject.translatedelectrical propertiesen
dc.titleStudy of copper thick film metallization on aluminum nitrideen
dc.typečlánekcs
dc.typearticleen
dc.type.statusPeer-revieweden
dc.type.versionpublishedVersionen

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