Modifications of effective optical properties of a-Si:H/a-SiNx:H multilayers by means of multilayer design and sublayer thickness
Date issued
2020
Journal Title
Journal ISSN
Volume Title
Publisher
Optical Society of America
Abstract
Description
Subject(s)
Citation
MÜLLEROVÁ, J. ŠUTTA, P. CALTA, P. NETRVALOVÁ, M. MEDLÍN, R. Modifications of effective optical properties of a-Si:H/a-SiNx:H multilayers by means of multilayer design and sublayer thickness. OSA Continuum, 2020, roč. 3, č. 6, s. 1385-1397. ISSN: 2578-7519