Thermal behaviour of magnetron sputtered tungsten and tungsten-boride thin films

Abstract

Description

Subject(s)

wolfram, borid wolframu, nanofilmy, tepelné zpracování, tepelně stimulovaná emise exoelektronů

Citation

2022 International Conference on Applied Electronics: Pilsen, 6th – 7th September 2022, Czech Republic, p. 29-32.