Design and fabrication of MEMS low power heating membrane
| dc.contributor.author | Svatoš, Vojtěch | |
| dc.contributor.author | Márik, Marian | |
| dc.contributor.author | Pekárek, Jan | |
| dc.contributor.author | Slavík, Jan | |
| dc.contributor.author | Chomoucká, Jana | |
| dc.contributor.author | Hubálek, Jaromír | |
| dc.contributor.editor | Pihera, Josef | |
| dc.contributor.editor | Steiner, František | |
| dc.date.accessioned | 2013-01-31T14:26:53Z | |
| dc.date.available | 2013-01-31T14:26:53Z | |
| dc.date.issued | 2012 | |
| dc.description.abstract-translated | The aim of this work is design and fabrication of micro hotplates. This type of device is often used for gas-sensing applications. The main goal is to produce the structure of the heating membrane using different fabrication process. Only wet etching process is used. Mainly two types of membranes are discussed – suspended and close type of the membrane. The sample which is going to be produced will be a membrane with the size of 1×1 mm, to ensure a suitable fabrication technology and the applicable design of the micro hotplate. The micro hotplates power consumption has to be up to 100 mW at the operating temperature 480 °C. | en |
| dc.format | 3 s. | cs |
| dc.format.mimetype | application/pdf | |
| dc.identifier.citation | Electroscope. 2012, č. 6, EDS 2012. | cs |
| dc.identifier.issn | 1802-4564 | |
| dc.identifier.uri | http://hdl.handle.net/11025/1049 | |
| dc.language.iso | en | en |
| dc.publisher | Západočeská univerzita v Plzni, Fakulta elektrotechnická | cs |
| dc.relation.ispartofseries | Electroscope | cs |
| dc.rights | © 2012 Electroscope. All rights reserved. | en |
| dc.rights.access | openAccess | en |
| dc.subject | nízkospotřebové tepelné membrány | cs |
| dc.subject | výrobní proces | cs |
| dc.subject.translated | manufacturing process | en |
| dc.subject.translated | low power heating membrane | en |
| dc.title | Design and fabrication of MEMS low power heating membrane | en |
| dc.type | konferenční příspěvek | cs |
| dc.type | conferenceObject | en |
| dc.type.status | Peer-reviewed | en |
| dc.type.version | publishedVersion | en |