Study of Internal Stress in Conductive and Dielectric Thick Films

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Hlina_materials-15-01372_publikovana_verze.pdf (2.84 MB)

Date issued

2022

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MDPI

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Citation

HLÍNA, J. ŘEBOUN, J. JANDA, M. HAMÁČEK, A. Study of Internal Stress in Conductive and Dielectric Thick Films. Materials, 2022, roč. 15, č. 23, s. 1-12. ISSN: 1996-1944

Item identifier

https://doi.org/2-s2.0-85143747369
 http://hdl.handle.net/11025/50955
 https://doi.org/10.3390/ma15238686

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