A novel hybrid integrated system for capacitive pressure MEMS sensors
| dc.contributor.author | Háze, Jiří | |
| dc.contributor.author | Pavlík, Michal | |
| dc.contributor.author | Vrba, Radimír | |
| dc.contributor.editor | Pihera, Josef | |
| dc.contributor.editor | Steiner, František | |
| dc.date.accessioned | 2012-10-17T12:02:20Z | |
| dc.date.available | 2012-10-17T12:02:20Z | |
| dc.date.issued | 2009 | |
| dc.description.abstract-translated | The paper deals with a novel hybrid integrated system for capacitive pressure MEMS sensors. This system should be splitted into the two parts. One is novel integrated capacity-to-current converter (C/I) and the second is auxiliary part made from standard SMD devices. The C/I converter was designed in CMOS process with technology AMIS 0,7 um. The second part consists of the sigma-delta converter, microcontroller, communication and data bus. The designed system profits from the previous works, where the capacity-to-digital output converter AD 7745 is the main part of the processing stage. This converter is substituted by the novel C/I converter. The C/I converter with digital calibration handled in microcontroller provide almost the same accuracy and linearity as the mentioned AD 7745 converter, but with less complexity of the whole circuitries. | en |
| dc.format | 4 s. | cs |
| dc.format.mimetype | application/pdf | |
| dc.identifier.citation | Electroscope, 2008, Konference EDS 2009. | cs |
| dc.identifier.issn | 1802-4564 | |
| dc.identifier.uri | http://hdl.handle.net/11025/548 | |
| dc.language.iso | en | en |
| dc.publisher | Západočeská univerzita v Plzni, Fakulta elektrotechnická | cs |
| dc.relation.ispartofseries | Electroscope | cs |
| dc.rights | Copyright © 2007-2010 Electroscope. All Rights Reserved. | en |
| dc.rights.access | openAccess | en |
| dc.subject | kapacitní senzory tlaku MEMS | cs |
| dc.subject | hybridní integrované obvody | cs |
| dc.subject | zpracování signálu | cs |
| dc.subject.translated | capacitive pressure MEMS sensors | en |
| dc.subject.translated | hybrid integrated systems | en |
| dc.subject.translated | signal processing | en |
| dc.title | A novel hybrid integrated system for capacitive pressure MEMS sensors | en |
| dc.type | článek | cs |
| dc.type | article | en |
| dc.type | konferenční příspěvek | cs |
| dc.type | conferenceObject | en |
| dc.type.status | Peer-reviewed | en |
| dc.type.version | publishedVersion | en |