Mechanical and electrical properties of evaporated thin layers
| dc.contributor.author | Vejmola, Tomáš | |
| dc.contributor.author | Yahya, Doaa | |
| dc.contributor.author | Sandera, Josef | |
| dc.contributor.editor | Pihera, Josef | |
| dc.contributor.editor | Steiner, František | |
| dc.date.accessioned | 2015-01-19T11:19:15Z | |
| dc.date.available | 2015-01-19T11:19:15Z | |
| dc.date.issued | 2014 | |
| dc.description.abstract-translated | The study deals with the vacuum evaporation technique of thin layers, considering different process parameters and their influence on electrical properties. Parameters, such as temperature, different substrate types, substrate vibrations, etc., are considered. The effects of the process parameters on the coating structure are observed. The temperature affects the coating quality and stability [1] [2]. Regarding electrical properties, the surface resistivity is measured by four-point method, whereas the influence of process parameters on the surface resistivity is determined as well. | en |
| dc.format | 4 s. | cs |
| dc.format.mimetype | application/pdf | |
| dc.identifier.citation | Electroscope. 2014, č. 3, EDS 2014. | cs |
| dc.identifier.issn | 1802-4564 | |
| dc.identifier.uri | http://hdl.handle.net/11025/11824 | |
| dc.language.iso | en | en |
| dc.publisher | Západočeská univerzita v Plzni, Fakulta elektrotechnická | cs |
| dc.relation.ispartofseries | Electroscope | cs |
| dc.rights | Copyright © 2014 Electroscope. All Rights Reserved. | en |
| dc.rights.access | openAccess | en |
| dc.subject | tenké vrstvy | cs |
| dc.subject | vakuové odpařování | cs |
| dc.subject | mechanické vlastnosti | cs |
| dc.subject | elektrické vlastnosti | cs |
| dc.subject | elektrická měření | cs |
| dc.subject.translated | thin layers | en |
| dc.subject.translated | vacuum evaporation | en |
| dc.subject.translated | mechanical properties | en |
| dc.subject.translated | electrical properties | en |
| dc.subject.translated | electrical measurements | en |
| dc.title | Mechanical and electrical properties of evaporated thin layers | en |
| dc.type | článek | cs |
| dc.type | article | en |
| dc.type.status | Peer-reviewed | en |
| dc.type.version | publishedVersion | en |
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