TEM and SEM investigation of AZO thin film microstructure
Date issued
2019
Journal Title
Journal ISSN
Volume Title
Publisher
University of West Bohemia
Abstract
Description
Subject(s)
tenká vrstva, AZO, mikrostruktura, SEM, TEM
Citation
JIRKOVÁ, Hana ed.; JENÍČEK, Štepán ed. Proceedings PING 2019: modern trends in material engineering: 10.-13.09.2019, Pilsen. 1. vyd. Plzeň: University of West Bohemia, 2019, s. 86. ISBN 978-80-261-0879-5.